IFCS 2014 will be hosting tutorials on Monday, May 19 at the TICC.
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Time |
Track 1 (MEMS Oscillators) |
Track 2 (Frequency References and Phase Noise) |
Track 3 (M/NEMS, BAW, SAW, Quartz Resonators) |
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8:00-10:00 |
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10:00-10:20 |
Coffee Break |
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10:20-12:20 |
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12:20-13:20 |
Lunch |
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13:20-15:20 |
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15:20-15:40 |
Coffee Break |
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15:40-17:40 |
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Track 1 (MEMS Oscillators)
Tutorial 1-1
Speaker: Aaron Partridge Affiliation: SiTime
Title: Introduction to Timing Devices Specifications and Applications
Abstract – Oscillators and timing devices provide the heart beats in most electronic systems. Albeit ubiquitous use, the relationship between the timing specifications and application requirements are still mysterious to some practicing engineers whose field of focus is not timing. This tutorial session briefly reviews the following subjects: MEMS for timing, key clock specifications, clocking requirements for different applications, including digital processors, serial interfaces (SONET, PCIe, SATA/SAS, 10GbE, …), RF links, frequency and time synchronized networks.
Speaker Bio – Aaron Partridge is Founder and Chief Scientist of SiTime Corp where he guides the technological direction. From 2001 through 2004, Dr. Partridge was Project Manager at Robert Bosch Research and Technology Center, where he coordinated the MEMS resonator and packaging research. From 1987 through 1991 he was a founder and Chief Scientist of Atomis, Inc., a manufacturer of STM, AFM, and BEEM (Scanning Tunneling, Atomic Force, and Ballistic Emission Electron) Microscopes. He received the B.S., M.S., and Ph.D. degrees in Electrical Engineering from Stanford University in 1996, 1999 and 2003. Dr. Partridge has authored and co-authored 30 scientific papers and holds 60 patents. He serves on the IEEE International Solid-State Circuits Conference, Imagers, MEMS, Medical and Displays Subcommittee, is the Editorial Chair of the IEEE International Frequency Control Symposium, and is an Associate Editor for the IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.
Speaker: Prof. Ashwin Seshia Affiliation: University of Cambridge
Title: Analytical models for co-design of resonators and circuits in MEMS oscillators
Abstract – MEMS oscillators are increasingly being commoditized for a variety of applications driven by form factor, integration and cost considerations. However, the design process still relies very substantially on numerical simulation, often conducted separately in the mechanical and circuit domains, particularly when dealing with non-linear effects and noise processes. This tutorial will introduce approaches for constructing and analyzing discrete models for MEMS oscillators, with an emphasis on the modelling of non-linearities and noise processes, aimed towards deriving physical insight in the design process. Mathematical models and experimental case studies introducing the role of engineered non-linearity in MEMS oscillators will also be discussed.
Speaker Bio – Ashwin A. Seshia received his BTech in Engineering Physics in 1996 from IIT Bombay, MS and PhD degrees in Electrical Engineering and Computer Sciences from the University of California, Berkeley in 1999 and 2002 respectively, and the MA from the University of Cambridge in 2008. During his time at the University of California, Berkeley, he was affiliated with the Berkeley Sensor & Actuator Center. He joined the faculty of the Engineering Department at the University of Cambridge in October 2002 where he is presently a Reader in Microsystems Technology and a Fellow of Queens' College. Dr Seshia serves on the editorial boards of the IEEE/ASME Journal of MicroElectroMechanical Systems and the IEEE Transaction of Ultrasonics, Ferroelectrics and Frequency Control.
Speaker: Prof. Clark T.-C. Nguyen Affiliation: University of California Berkeley
Title: MEMS-Based Oscillators
Abstract – Reference oscillators based on high-Q MEMS resonators have recently become viable alternatives to traditional quartz versions for low-end timing purposes in such applications as televisions and camcorders. Higher end versions of such oscillators suitable for cell phone or other communication applications seem poised to soon hit the market. Indeed, with resonator Q’s exceeding 100,000, research oscillators have posted impressive phase noise performance, even achieving marks that meet the challenging GSM specification while consuming less than 100µW of power. While such devices offer compelling savings in power and space compared to quartz for cell phone applications, they await improvements in aging and temperature stability. In addition, further reductions in power consumption are still desired for future autonomous wireless sensor networks, where nodes would be expected to operate and communicate for long periods without the luxury of replacing their power sources. The integrated circuit nature of MEMS technology that encourages the use of multiple resonators (which often come for practically free) will likely be instrumental towards this goal.
This tutorial presents an overview of the models, circuit topologies, and overall design strategies that have yielded present-day MEMS-based oscillator products and that might propel future such oscillators for higher end applications. Time permitting, all aspects will be covered, from fabrication technology, including packaging; to MEMS-based resonator design and mechanical circuit modeling; to oscillator modeling and design, including design strategies to minimize noise and other short term instabilities, e.g., acceleration sensitivity; to methods for nulling drift due to temperature dependency and aging. Emphasis will be devoted to the differences and similarities between MEMS-based oscillators and their quartz counterparts.
Speaker Bio – Prof. Clark T.-C. Nguyen received the B. S., M. S., and Ph.D. degrees from the University of California at Berkeley in 1989, 1991, and 1994, respectively, all in Electrical Engineering and Computer Sci¬ences. In 1995, he joined the faculty of the University of Michigan, Ann Arbor, where he was a Professor in the Department of Electrical Engineering and Computer Science up until mid-2006. In 2006, he joined the Department of Electrical Engineering and Computer Sciences at the University of California at Berkeley, where he is presently a Professor and a Co-Director of the Berkeley Sensor & Actuator Center. His research interests focus upon micro electromechanical systems (MEMS) and include integrated micromechanical signal processors and sensors, merged circuit/microme¬chanical technologies, RF communication architectures, and integrated circuit design and technology. In 2001, Prof. Nguyen founded Discera, Inc., the first com¬pany aimed at commercializing communication products based upon MEMS technology, with an initial focus on the very vibrating micromechanical resonators pioneered by his research in past years. He served as Vice President and Chief Technology Officer (CTO) of Discera until mid-2002, at which point he joined the Defense Advanced Research Projects Agency (DARPA) on an IPA, where he served for three-and-a-half years as the Program Manager for 10 different MEMS-centric programs in the Microsystems Technology Office of DARPA. Prof. Nguyen was the Technical Program Chair of the 2010 IEEE Int. Frequency Control Symposium and a Co-General Chair of the 2011 Combined IEEE Int. Frequency Control Symposium and European Frequency and Time Forum. He is an IEEE Fellow and served as a Distinguished Lecturer for the IEEE Solid-State Circuits Society from 2007 to 2009. From 2008 to 2013, Prof. Nguyen served as the Vice President of Frequency Control for the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society and is presently the President-Elect of the society.
Speaker: Dr. Roy Olsson III Affiliation: Sandia National Laboratories
Title: Piezoelectric Micromechanical Oscillators
Abstract – This tutorial will review the state of the art and future directions of piezoelectric micromechanical oscillators. The tutorial will begin by discussing different types of piezoelectric micromechanical resonators, such as film bulk acoustic resonators (FBARS), contour mode acoustic resonators, thin-piezoelectric-on-silicon (TPOS) resonators and micromachined quartz resonators. Particular emphasis will be paid to how the characteristics of these different resonators, such as quality factor, power handling, coupling coefficient, thermal drift and vibration stability, impact oscillator performance. Next, examples of piezoelectric MEMS oscillators will be reviewed. Finally, a look towards the future of piezoelectric MEMS oscillators will be discussed.
Speaker Bio – Roy H. Olsson III is a Principal Electronics Engineer in the MEMS Technologies Department at Sandia National Laboratories in Albuquerque, NM. He received B.S. degrees (Summa Cum Laude) in electrical engineering and in computer engineering from West Virginia University in 1999 and the MS and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor in 2001 and 2004. At Sandia Roy leads research programs in the areas of piezoelectric RF microresonators, oscillators, filters, and monolithic CMOS/MEMS integration. Roy has co-authored 24 journal and 68 conference papers and holds 13 patents in the area of MEMS and microelectronics. Roy served on the organizing committee of the 2011 Phononics Conference and has been a member of the Technical Program Committee for the IEEE Ultrasonics Symposium (IUS) since 2010. Roy is a member of the IEEE Solid State Circuits Society, IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society, Eta Kappa Nu, and Tau Beta Pi. Together with the Sandia Microresonator Research Team, he was awarded an R&D100 award in 2011 for his work on Microresonator Filters and Frequency References.
Track 2 (Frequency References and Phase Noise)
Speaker: Dr. Enrico Rubiola Affiliation: FEMTO-ST and CNRS
Title: The magic of cross-correlation in measurements from dc to optics
Abstract – The reduction of the instrument background noise is a challenge in numerous domains of experimental science and technology. The correlation method provides a solution in most cases when it is possible to measure the same device under test (DUT) with two separate and independent instruments.
Let us denote with c(t) the physical quantity to be measured, with a(t) and b(t) the background of the two instruments, and with x(t) = c(t) + a(t) and y(t) = c(t) + b(t) the signals available at the instrument outputs. Assuming that the process are stationary and ergodic (the physical experiment is repeatable and reproducible) and that the two instruments are independent, the average correlation of x and y gives the statistical properties of c(t). The single-channel noise is rejected proportionally to the square root of the number m of averages, and ultimately to the square root of the measurement time. The background noise is limited by the thermal inhomogeneity of the system instead of the absolute temperature. The Wiener-Khinchin theorem guarantees that the average product of the Fourier transform of x(t) and y(t) converges to the power spectrum of c(t). The smoothness of the cross-spectrum tells us whether m is sufficient or not for the cross-spectrum to converge to the DUT noise. This property enables to validate the result in the case of AM noise and laser RIN, where we cannot assess the single-channel noise of the instrument without a suitable low-noise reference. In AM and PM noise measurements, we use correlation with the bridge or the differential method, and the synchronous detection. A background noise of parts in 10-21 rad2/Hz (white) and of 10-18 rad2/Hz (flicker at 1 Hz from the carrier) has been reported. Of course the correlation method has applications in numerous domains. It is the basis of the correlation receiver used in radio-astronomy, with which R. Hanbury-Brown measured the first radio sources in the Cassiopeia and Cygnus constellations. The correlation radiometer followed, opening the way to a future redefinition of the temperature in terms of fundamental constants. Laser beams, chemical batteries and other dc references have been measured with correlation. The attempt to port this idea to optics yielded the discovery of the Hanbury-Brown-Twiss effect, later observed in electronic circuits at low temperature. In semiconductor technology small random signals reveal impurities, defects and energy traps of a dc-biased sample. Another exotic application is the measurement of electromigration in metals at high current density, through the asymmetry between AM and PM 1/f noise, which impacts on VLSI technology.
Speaker Bio – Enrico Rubiola is a Senior Scientist at the CNRS FEMTO-ST Institute and a Professor at the Universitè de Franche Comtè. With previous positions as a Professor at the Universitè Henri Poincarè, Nancy, and in Italy at the University Parma and the Politecnico di Torino, he has also consulted at the NASAICaltech Jet PropulsionLaboratory. His research interests include low-noise oscillators, phase and frequency-noise metrology, frequency synthesis, atomic frequency standards, radio-navigation systems, precision electronics from dc to microwaves, optics and gravitation.
Speaker: Dr. Michael M. Driscoll Affiliation: Consultant
Title: Vibration-Induced Phase Noise
Abstract – This, two-part, two-hour Tutorial will focus on vibration-induced phase noise in oscillator and non-oscillator components. Part I will cover the analytical aspects of the subject. Part II will deal with measurement methods and troubleshooting techniques. At the conclusion of the Tutorial, attendees should be able to:
1. Identify the sources of vibration-induced phase noise in components and circuit assemblies.
2. Translate between the different methods of specifying vibration sensitivity and allowable levels of vibration in components and electronic assemblies.
3. Be aware of the various techniques for reducing vibration sensitivity and the proper use of those techniques, including mechanical isolator design and specification.
4. Become familiar with measurement methods and troubleshooting techniques.
Speaker Bio – Mike Driscoll joined the Westinghouse Defense Centre (now part of Northrop Grumman Electronic Systems) in Baltimore in 1965 after graduating from the University of Massachusetts in Amherst. Since 1968, he has worked primarily on the design and development of low noise signal generation hardware for use in high performance radar systems and other special applications. He was a Senior Consulting Engineer and subsequently a contract engineer at Northrop Grumman until retiring in December, 2012. His responsibilities included the design and development of high stability oscillators as well as characterization and reduction of phase noise in RF signal processing components and circuits. He is a past Secretary, Treasurer, and President of the Baltimore, Washington, and Northern Virginia chapter of the UFFC. He has been a member of the IEEE Frequency Control Symposium Technical Program Committee since 1987. He is an Associate Editor and Associate Editor-in-Chief of the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control (UFFC) and was the Conference Chair for the 2005, 2006, and 2012 IEEE International Frequency Control Symposia (IFCS). In 1991, he was elected an IEEE Fellow, cited for "Contributions to the development of low-noise acoustic resonator-stabilized oscillators". In 1997, he was the recipient of the IEEE UFFC Society CADY award, cited for Contributions to Low Noise Signal Generator Design. In 2006, he was a recipient of the Northrop Grumman Lifetime Achievement Award and, in 2013, the IEEE UFFC Society’s Distinguished Service Award. He is the UFFC Society’s Distinguished Lecturer for 2012-2013. He has published and presented over 60 papers in IEEE Journals and at IEEE Conferences. He has presented several IEEE Tutorials and Northrop Grumman Instructional Courses and holds 16 U.S. Patents dealing with the subject of Low Noise Signal Generation. He is currently a consultant.
Speaker: Dr. Elizabeth Donley Affiliation: NIST
Title: Atomic Clocks
Abstract – This tutorial will provide an introduction to atomic clocks followed by an overview of the principles of operation of several types of commercial clocks. Cesium beam clocks, Hydrogen Masers, Rubidium vapor-cell clocks, and clocks based on coherent population trapping including chip-scale atomic clocks will all be reviewed.
Speaker Bio – Elizabeth Donley has been a Physicist in the Time and Frequency Division of the National Institute of Standards and Technology (NIST) in Boulder Colorado for 12 years. She received the B.Sc. degree in physics from the University of Nevada, Las Vegas, in 1994, the M.Sc. degree in physics from the University of Colorado, Boulder, in 1996, and the Ph.D. degree in natural sciences from the Swiss Federal Institute of Technology, Zürich, in 2000. She has 20 years of experience with advanced laser cooling and atomic and molecular optics experiments. This experience includes postdoctoral work on Bose-Einstein condensation, the maintenance and development of NIST’s atomic fountain clocks, the design and review of the PARCS atomic clock project designed for the International Space Station, and laboratory studies on NMR gyroscopes. Her recent focus has been on the development of a compact cold-atom clock based on coherent population trapping and a similar atom interferometry instrument.
Speaker: Dr. Lute Maleki Affiliation: OEwaves, Inc.
Title: Optical Oscillators
Abstract – Spectrally pure and stable microwave and mm-wave reference signals have widespread applications in high rate data processing, communications, and radar systems. The emerging technology of RF photonics directly meets the challenge of providing high spectral purity for emerging applications, beyond what is possible with traditional electronics approaches. In this tutorial the basis of optical oscillators will be presented, followed by examples of various architectures and latest developments for generation of fixed and tunable frequency oscillators. Future prospects of this powerful technology will also be discussed.
Speaker Bio – Lute Maleki is a Founder and President and CEO of OEwaves, Inc. Previously he was at JPL and created and led the Quantum Sciences and Technologies Group. Dr. Maleki’s previous and current research include study and development of ultra-stable photonic oscillators; whispering gallery mode optical microresonators; atomic clocks based on ion traps and laser cooled atoms; quantum sensors. He has over 45 U.S. Patents, authored 150 refereed publications, serve on technical program committees, is a Fellow of the IEEE, a Fellow of APS, and a Fellow of the Optical Society of America. He received the IEEE Rabi Award, NASA’s Exceptional Engineering Achievement Medal, and IEEE UFFC Sawyer Award.
Track 3 (M/NEMS, BAW, SAW, Quartz Resonators)
Speakers: Dr. John Vig and Prof. Yook-Kong Yong Affiliation: Consultant (Vig), Rutgers University (Yong)
Title: Fundamentals, Analysis and Design of Quartz Crystal Resonators and Oscillators
Abstract – This short course is divided into two parts: of one-hour each
Part I: Fundamentals of Crystal Resonators and Oscillators, John R. Vig
The fundamentals of crystal resonators and oscillators will be reviewed. Emphasis will be on those aspects that are of greatest interest to users (as opposed to designers). The discussion will include: (1) crystal resonator and oscillator basics; (2) the characteristics and limitations of temperature compensated crystal oscillators (TCXOs) and oven controlled crystal oscillators (OCXOs); (3) oscillator instabilities: aging; noise; and the effects on frequency stability of: temperature, acceleration, radiation, warm-up, pressure, magnetic field, and the oscillator circuitry; and (4) guidelines for oscillator comparison, selection and specification.
Part II: Analysis and Design of Quartz MEMS Resonators, Yook-Kong Yong
Review of the finite element method for analysis and design of quartz MEMS resonators such as tuning forks and thickness shear resonators. Discussions on the accuracy of resonant frequency, and frequency spectrum for design purposes. Effects of the resonator and electrode geometry and mounting support structure on the quality factor (Q), and electrical parameters R1, L1 , C1 , and C0. If time permits, frequency-temperature analysis and design of AT- and SC-cut MEMS resonators.
Speaker Bios –
John Vig was born in Hungary. He emigrated to the United States in 1957, where he subsequently received the B.S. degree from the City College of New York and his Ph.D. degree from Rutgers - The State University. He spent his professional career performing and leading R&D in US government research laboratories - developing high stability quartz crystal resonators, oscillators, and sensors.
He has been awarded 55 patents and is the author of more than 100 publications, including nine book chapters. Since 2006, he has been a consultant, mainly to program managers at the US Defense Advanced Research Projects Agency (DARPA) for programs ranging from micro- and nanoresonators to chip-scale atomic clocks. He is an IEEE Life Fellow, and is the recipient of the IEEE Cady Award and the IEEE Sawyer Award. He has been the Distinguished Lecturer of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control (UFFC) Society, and he has served as the president of this Society. He founded the IEEE Sensors Council, served as its founding president, and he served as the 2009 IEEE President and CEO. He and his wife live in Colts Neck, NJ, USA. Their main hobby is ballroom dancing.
Yook-Kong Yong is professor at Rutgers University, Dept. of Civil and Environmental Engineering, New Jersey, U.S.A. He received the B.S. degree in civil engineering(1979) from Lafayette College, Pennsylvannia, U.S.A., the M.A.(1981) and Ph.D.(1984) degrees in structures/mechanics from Princeton University, New Jersey, U.S.A. He is a registered Professional Engineer in New Jersey. He serves as an associate editor for the journal IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. He is a member of the IEEE and ASCE societies. At the IEEE Society, he serves as the chair of Technical Program Committee for the IEEE Ultrasonics Symposium 2011, and as a member of the Technical Program Committee for the IEEE Ultrasonics Symposia, and IEEE Frequency Control Symposia in the years 1989 to present. His research interests are in the numerical modeling of bulk acoustic wave and surface acoustic wave piezoelectric resonators and filters; their frequency-temperature behavior, acceleration sensitivity, noise characteristics and thermal stress behavior. He has also practiced as a consultant to the industry.
Speaker: Prof. Ken-ya Hashimoto Affiliation: Chiba University
Title: Fundamentals of RF Acoustic Resonators and Their Characterization
Abstract – When RF acoustic resonators are designed and fabricated, measured results are usually worse than the simulation. What shall we do for the next trial? In my experience, careful investigation of measured results is the best way for finding hidden troublemakers. But you may ask me "how?"
This tutorial starts from the basics of RF acoustic resonators. Then mechanisms which degrade resonator performances are discussed, and it is shown how they appear in the electrical characteristics. Finally, characterization of RF resonators is demonstrated for several examples.
Speaker Bio – Ken-ya Hashimoto received his B.S. and M.S. degrees in electrical engineering in 1978 and 1980, respectively, from Chiba University, Chiba, Japan, and a Dr. Eng. degree in 1989 from Tokyo Institute of Technology, Tokyo, Japan. In 1980, he joined Chiba University as a research associate, and is now a professor at the university. His current research includes various types of surface and bulk acoustic wave devices, acoustic wave sensors, and application of thin film micromachining technologies to the acoustic wave devices.
Speaker: Prof. Matteo Rinaldi Affiliation: Northeastern University
Title: Piezoelectric Resonant MEMS Devices for Radio Frequency Communication and Sensing Applications
Abstract – Piezoelectric resonant MEMS devices have shown significant potential for radio frequency (RF) communication and sensing applications. This is due to their excellent features such as small size, wide range of operating frequencies (from few MHz to several GHz), high transduction efficiency and high quality factor (Q).
This tutorial covers the basic concepts needed to understand the working principle, design, fabrication and testing of piezoelectric resonant MEMS devices including material properties, fabrication technologies, structural mechanics, piezoelectric sensing and actuation principles, lumped modeling for mechanical vibration and testing techniques.
Furthermore, key applications and ongoing challenges of piezoelectric MEMS resonant devices are identified and discussed through a state of the art review and case studies of several classes of devices including sensors and RF components.
Speaker Bio – Matteo Rinaldi received his Ph.D. degree in Electrical and Systems Engineering from the University of Pennsylvania, Philadelphia, in 2010. He joined the Electrical and Computer Engineering department at Northeastern University as an Assistant Professor in January 2012. Dr. Rinaldi’s research focuses on understanding and exploiting the fundamental properties of micro/nanomechanical structures and advanced nanomaterials to engineer new classes of micro and nanoelectromechanical systems (M/NEMS) with unique and enabling features applied to the areas of chemical, physical and biological sensing and low power reconfigurable radio communication systems. He has authored more than 40 publications in the aforementioned research areas and also holds 7 device patent applications in the field of micro/nano mechanical resonant devices. Dr. Rinaldi was the recipient of the DARPA Young Faculty award class of 2012. He received the Best Student Paper Award at the 2009 and 2011 IEEE International Frequency Control Symposiums. Dr. Rinaldi is an elected member of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society (UFFC) Administrative Committee (AdCom).
Speaker: Prof. Sheng-Shian Li Affiliation: National Tsing Hua University
Title: CMOS-MEMS Technology for Frequency Control
Abstract – This tutorial provides the fundamentals and recent progress of the high-Q integrated micromechanical resonators, oscillators, and filters using the “CMOS-MEMS technology” to enable monolithic integration of MEMS and IC for frequency control applications. The content covers four major parts, including (i) the fabrication technologies of the CMOS-MEMS resonators/sensors and their associated interface circuitry; (ii) the performance enhancement of the resonators on motional impedance, quality factor, power handling, thermal stability, frequency tuning, and parasitic feedthrough; (iii) the implementation of the CMOS-MEMS resonators for frequency generation (i.e., oscillators) and frequency selection (i.e., filters) functionalities; and (iv) the transduction mechanisms other than purely capacitive transducers, such as capacitive-drive / piezoresistive sense and thermal drive / piezoresistive sense versions, implemented in CMOS-MEMS resonators. In the first part, various fabrication technologies in the 0.35μm and 0.18μm CMOS technology nodes will be presented, showing their own features and advantages. In the second part, several strategies in design aspects and material points of view will be described in order to enhance the performance of the CMOS-MEMS resonators. In the third part, designs and experimental results of the CMOS-MEMS oscillators and filters will be presented. In the last part, different transductions used in CMOS-MEMS resonators will be covered mainly targeted for sensor applications. We take full advantage of the IC and semiconductor strength in Taiwan to develop several CMOS-MEMS resonator platforms towards single-chip implementation for timing reference, oscillator, filter, and sensor applications.
Speaker Bio – Sheng-Shian Li received the B.S. and M.S. degrees in mechanical engineering from the National Taiwan University, Taipei, Taiwan, in 1996 and 1998, respectively, and the M.S. and Ph.D. degrees from the University of Michigan, Ann Arbor, MI, USA, in 2004 and 2007, respectively, both in electrical engineering and computer science. In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters. In 2008, he joined the Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, where he is currently an Associate Professor. His current research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, CMOS-MEMS technology, front-end communication architectures, and integrated circuit design and technology. Dr. Li was a recipient of the Young Faculty Research Award from the National Tsing Hua University in 2013. In the same year, Dr. Li also received the Ta-Yu Wu Memorial Award, National Science Council, Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He also served as the TPC of the IEEE International Frequency Control Symposium (2010-2014) and the IEEE Sensors Conference (2012-2013).